pdfnanoimprint patterned aluminum photonic grating for

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Nanoimprint Patterned Aluminum Photonic Grating for.

60 C, the template is separated from the wafer leaving a patterned layer of PMMA on the aluminum layer. An O2 plasma is used to remove the residual PMMA in the holes before dry etching of the aluminum. Any remaining PMMA is removed with acetone. A completed aluminum grating is shown in Fig. 2.

Vertically integrated diffractive gratings on photonic.

The metal grating is parallel to the x axis. c The crosssectional scanning electron microscope image of the device with the metal grating and ITO periodic structure perpendicular to the x axis.

Patterned photostimulation via visiblewavelength photonic.

At their termini, the photonic waveguides drive grating couplers termed Epixels, which couple light offshank into brain tissue. All the onchip photonic elements are patterned from a 200nm thick silicon nitride layer, which is deposited on top of the oxidized silicon structural layer used to form the probe body.


IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 19, NO. 23, DECEMBER 1, 2007 1919 Compact Focusing Grating Couplers for SilicononInsulator Integrated Circuits Frederik Van Laere, Student Member, IEEE, Tom Claes, Jonathan Schrauwen, Student Member, IEEE, Stijn S.

Angledependent structural colors in a nanoscalegrating.

The photonic crystal film with grating patterns was fabricated by PDMS. The grating patterns were replicated through reverse NIL NIL150, China by the patterned PC master mould with a 10:1 weight ratio mixture of elastomer and crosslinker. The fabrication of PDMS photonic crystal films could be divided into four steps: 1 the pre solution was firstly poured onto the PC mould after.

Complementary metaloxidesemiconductor compatible high.

The grating consists of arrays of 80nm 343nm rectangular air holes, which can be patterned in a single lithography/etch. A peakcoupling efciency of 59 at 1551.6nm and a 3dB bandwidth of 60nm are achieved utilizing the silicononinsulator platform with a 1lm thick buriedoxide layer for transverse electric mode.


light incident on a grating coupler 11 in a waveguide couples directly into the photonic wire waveguide with an efciency up to 30 and an angle tolerance below 1 dB per 2 .However, light incident on the chip surface in the area in front of this grating will be transmitted through the siliconair interface.

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